Toffoli, 2013

2013 - Sensors (Basel). 2013 Dec 4;13(12):16657-71.

Heater-integrated cantilevers for nano-samples thermogravimetric analysis

Toffoli V, Carrato S, Lee D, Jeon S, Lazzarino M.


The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.


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